冯广智 叶言明 沈华明 陈冬冬 周智维 李军 周天琛

摘要：针对紫外 LED 激光气密性封装焊接工艺技术进行攻关，结合多年自主研发激光封焊设备、LED 封装材料和激光焊接工艺开发的经验，对紫外 LED 激光气密性封装关键技术进行了研究。对比分析了激光气密性封焊较其他封焊方法优势。应用自主研发的激光封焊设备进行完整的封焊工艺流程，验证了镭通自主研发的激光封焊设备及紫外光窗的工业化生产可行性。通过对单脉冲能量、基板与管壳间隙等工艺参数的调整，结合焊缝深度和气密性测试，验证激光气密性封装工艺的可行性，并且得到合适的工艺窗口。突破激光气密性封焊熔池深度控制、气密性优化等关键技术。为紫外 LED 激光气密性封装焊接的工业化量产提供实际数据基础。关键词：激光焊接;激光气密性封焊;紫外 LED 封焊

中图分类号：TG456.7             文獻标志码：A        文章编号：1009-9492（2021）12-0097-04

Application of Laser Welding in UV LED Airtight Packaging

Feng Guangzhi1， 2，Ye Yanming1， 2，Shen Huaming1， 2，Chen Dongdong1， 2，Zhou Zhiwei1， 2，Li Jun1， 2，Zhou Tianchen1， 3

（1. Zhuhai Leitong Laser Technology Co.， Ltd.， Zhuhai， Guangdong 519099， China;2. Zhongshan Leitong Laser Technology Co.， Ltd.，Zhongshan， Guangdong 528437， China;3. Changchun University of Technology， Changchun 130013， China）

Abstract： The key technology of laser hermetic encapsulation of UV LEDs was studied by combining years of experience in independent research and development of laser sealing equipment， LED packaging materials and laser welding process development. The advantages of laser hermetic sealing over other sealing methods were compared and analyzed. The self-developed laser sealing equipment was applied to perform a complete sealing process， and the feasibility of industrial production of self-developed laser sealing equipment and UV windows were verified. Through the adjustment of process parameters such as single pulse energy， substrate and shell gap， combined with weld depth and hermeticity test， the feasibility of laser hermetic sealing process was verified and the suitable process window was obtained. Key technologies such as weld pool depth control and gas tightness optimization of laser gas tight seal welding are broken through， the practical data basis is provided for industrial mass production of UV LED laser hermetic package welding.

Key words： laser welding; laser hermetic sealing; UV LED sealing

0 引言

紫外 LED 具有环保无汞、寿命长、功耗低、响应快、结构轻巧等诸多优势。紫外 LED 在环境、生命科学和工业领域得到了广泛应用。由于其发射波长和光子能量的不同，近紫外 LED 广泛应用于油墨印刷、树脂固化、照明、标识等领域，而深紫外 LED 在消毒、空气和水净化、医疗、生化检测等领域具有广阔的应用前景[1]。因气密性封装可以有效提升 LED 的使用寿命，本文目的在于采用激光焊进行紫外 LED 的气密性封装，探究激光封焊工艺参数和气密性的关系，验证该自主研发紫外光窗的气密性能，获得合适的工艺窗口，以延长紫外 LED 的使用寿命。……