周晓斌 王玫 王旭丹

摘 要：【目的】常见膜式结构和悬浮式结构的MEMS气体传感器在垂直方向上存在寄生电场，会对气体传感器的检测信号造成一定影响。为了降低寄生电场对气体传感器性能的影响，提出了一种共面结构的MEMS气体传感器，并对其微热板进行了建模仿真及优化。【方法】利用SolidWorks对共面式MEMS气体传感器进行建模，并通过有限元分析方法从热稳定性、机械稳定性等方面对微热板进行了仿真。【结果】仿真结果表明：共面结构的微热板可以在整个气体传感器的测量区域内提供稳定、均匀的热分布，并且可以避免高温工作时微热板加热电极和气体传感器测量电极之间相互连通，为MEMS气体传感器提供优异的测量环境。【结论】共面式MEMS气体传感器不仅可以有效降低垂直方向上的寄生电场对传感器性能的影响，而且可以简化气体传感器的工艺流程。仿真结果也证明了共面结构的可行性，为实际MEMS气体传感器的设计和制备提供参考依据。

关键词：共面结构；MEMS；气体传感器；微热板；有限元仿真

中图分类号：TN303     文献标志码：A     文章编号：1003-5168（2024）08-0018-05

DOI：10.19968/j.cnki.hnkj.1003-5168.2024.08.004

Design and Simulation of Micro heater for Coplanar MEMS Gas Sensors

ZHOU Xiaobin1 WANG Mei2 WANG Xudan3

（1.Zhengzhou University of Light Industry College of Software Engineering，Zhengzhou 450002， China;

2.Zhengzhou University of Light Industry School of Electronics and Information，Zhengzhou 450002， China;

3.Zhengzhou University of Light Industry School of Computer Science and Technology，Zhengzhou 450002， China）

Abstract： [Purposes] Traditional MEMS gas sensors with membrane and suspension structures have parasitic electric fields in the vertical direction， which can affect the detection of the gas sensors. In order to reduce the impact of parasitic electric fields on the performance of gas sensors， a MEMS gas sensor with coplanar structure was proposed， and the micro heater of the gas sensor with coplanar structure was modeled， simulated， and optimized. [Methods] SolidWorks was used to model the MEMS gas sensor with coplanar structure， and finite element analysis （FEA） was used to simulate the micro heater from the aspects of thermal stability， mechanical stability， etc. [Findings] The finite element simulation results show that the micro heater of the gas sensor with coplanar structure can provide a stable and uniform heat distribution throughout the measurement area of the gas sensor， and can avoid interconnection between the heating electrodes of the micro heater and the measurement electrodes of the gas sensor during high-temperature operation， providing an excellent detection environment for MEMS gas sensors. [Conclusions] MEMS gas sensors with coplanar structure can effectively reduce the impact of parasitic electric fields in the vertical direction on the performance of gas sensors and simplify the technique processes of MEMS gas sensors. The simulation results also demonstrate the feasibility of coplanar structures， providing a basis for the design and preparation of actual MEMS gas sensors.

Keywords： Coplanar structure; MEMS; gas sensors; micro heater; finite element analysis （FEA）

0 引言

气体传感器是一种可以将特定环境中气体的成分、浓度、体积分数等信息转换成电信号的转换元件，在现代工业及居民生活的很多领域中有着广泛的应用，如环境保护、工业生产、公共安全、个人健康监测等。根据工作原理的不同，气体传感器分为很多种类，其中金属氧化物半导体（Metal oxide semiconductor，MOS）气体传感器以其灵敏度高、响应时间短、成本低廉等优点成为研究的热点［1-2］。……