王党树 古东明 栾哲哲 刘树林 王新霞

摘 要：長间隙、高电压放电研究相对成熟，而有关微纳间隙、低电压击穿和放电规律的研究并不多见，其放电规律和物理机制尚不明晰。在研究低电压、微间隙放电时发现当极间间距达到微纳尺度的某个距离时击穿电压开始偏离PACHEN曲线。因此，对PACHEN曲线的补充与修正成为研究热点。通过程控微纳间隙放电实验平台研究极间距离范围在1～20 μm内击穿放电特性和规律，当极间距离在小于7 μm时偏离了

PACHEN曲线;7～20 μm之间随着极间距离的增加，击穿电压也随之增大，符合PACHEN曲线变化趋势。将实验平台气室内环境抽成真空对比极间距离在1～7 μm范围内的空气间隙放电，发现真空条件下的击穿电压随极间距离的变化趋势与空气间隙条件下的变化趋势一致且相同极间距离下的击穿电压相差很小，并运用Fowler-Nordheim理论验证在此范围内场致发射对击穿起着主导作用。关键词：短间隙;击穿放电;击穿电压;PACHEN曲线;场致发射中图分类号：TN 136

文献标志码：A

文章编号：1672-9315（2020）06-01102-07

DOI：10.13800/j.cnki.xakjdxxb.2020.0622开放科学（资源服务）标识码（OSID）：

Research on micro-gap breakdown based on micro-nano

program-controlled platform

WANG Dang-shu1，GU Dong-ming1，LUAN Zhe-zhe1，LIU Shu-lin1，WANG Xin-xia2

（1.

College of Electrical and Control Engineering，Xian University of Science and Technology，Xian 710054，China;

2.College of  Sciences，Xian University of Science and Technology，Xian 710054，China）

Abstract：The research on long gap and high voltage discharge is relatively mature，but the research on Wiener gap，low voltage breakdown and discharge law is rare，and the discharge law and physical mechanism remains unclear.In studying low-voltage，micro-gap discharge，it was found that the breakdown voltage began to deviate from the PACHEN curve when the distance between the electrodes reached a certain degree on the micro-nano scale.Therefore，the supplement and correction of PACHEN curve has become a research hotspot of the personnel involved.In this paper，a program-controlled micro-nano gap discharge experiment platform is used to study the characteristics and laws of breakdown discharge within the range of 1～20 μm between electrodes.It is found that when the distance between the electrodes is less than 7 μm，it deviates from the PACHEN curve;within the range of 7～20 μm，the distance between the electrodes increases.With the

distance increasing，the breakdown voltage also increases，in line with the PACHEN curve change trend.The air chamber environment of the experimental platform was evacuated and compared to the air gap discharge with the distance between the electrodes in the range of 1～7 μm.It was found that the change trend of the breakdown voltage under the vacuum condition with the distance between the electrodes was consistent and the same as that under the air gap condition.The breakdown voltage at the distance between the electrodes is very small，and the Fowler-Nordheim theory is used to verify that the field emission plays a leading role in the breakdown in this range.

Key words：short gap;breakdown discharge breakdown voltage;air gap;PACHEN curve;field emission

0 引 言

微间隙放电是指电极间隙被限制在亚毫米以下量级的放电现象[1]。随着微电子工艺、集成电路和真空电子器件的发展[2-4]，微间隙放电引起越来越多学者的关注。在微间隙放电过程中的低温等离子体被广泛应用到生命与环境科学[5-6]、空间技术[7]和信息处理技术[8]等领域。对微间隙放电规律和特性的研究从20世纪50年代一直未间断，德国物理学家PACHEN将不同极间距离下的击穿电压绘制成曲线称为PACHEN 曲线[9]，英国物理学家TOWNSEND根据TOWNSEND放电理论[10]分析PACHEN 曲线推导出PACHEN 定律的数学表达式[11]。……