第一作者连海山男，博士生，1985年3月生

微细超声工作台的设计与微振幅测量

连海山，郭钟宁 ，张伟，何俊峰，韩睿聪

(广东工业大学机电工程学院，广州510006)

摘要：微细超声工作台是微细超声加工机床与微细超声振动辅助加工机床的关键零部件，其振幅值直接影响加工精度与加工效率。传统的振幅测量方法很难准确的测出微细超声工作台的微振幅。基于精密微三维运动平台的高分辨率，提出了一种恒力控制的微振幅测量方法，成功的测量出能精确到0.1μm的微振幅。首先对微细超声工作台中的微细超声振动系统进行了理论设计，然后采用基于恒力控制的超声振幅测量方法，对不同功率作用下的微细超声振动系统的振幅值进行了测量。

关键词：微细超声工作台；微细超声加工；微振幅；设计；测量

基金项目：国家自然科学基金重点资助项目(U1134003);国家自然科学基金(51175091)

收稿日期：2013-11-08修改稿收到日期：2014-04-16

中图分类号:TB534+.2

文献标志码：A

DOI:10.13465/j.cnki.jvs.2015.07.031

Abstract:The micro ultrasonic worktable is the key component of the machining tools for micro ultrasonic machining and micro ultrasonic vibration assisted machining. The vibration amplitude of the micro ultrasonic worktable has significant effect on the machining precision and processing efficiency. The traditional vibration measurement methods can hardly measure the micro amplitude of the micro ultrasonic worktable precisely. Based on the high resolution demand of the precise micro three-dimensional motion worktable, a micro amplitude measurement method controlled by constant force was presented and the micro amplitude of 0.1 μm precision has been measured successfully. The theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable was carried out in the first section of the paper. In the second section, amplitudes of the micro ultrasonic vibration system with different power were measured by the proposed method.

Design of micro ultrasonic worktable and measurement of its micro amplitude

LIANHai-shan,GUOZhong-ning,ZHANGWei,HEJun-feng,HANRui-cong(School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China)

Key words:micro ultrasonic worktable; micro ultrasonic machining; micro amplitude; design; measure

硬脆性材料(陶瓷、玻璃、石英等)由于其密度低、强度高、对高温与酸碱性不敏感、不易磨损，在微细制造领域有着广泛的应用前景。然而由于高硬、高脆性，硬脆性材料加工成形极具困难。大部分硬脆性材料为非导电材料，不能使用电加工工艺对其进行加工；材料的硬度一般都比刀具的硬度大，不能使用传统的微车铣削加工；目前适合于硬脆性材料微细加工的方法主要有微细激光加工与微细超声加工。微细激光加工几乎可以加工所有的材料，但是加工后的工件具有不可避免的热影响区以及难以加工高深宽比的零部件。……