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纳米技术与精密工程
2022年2期
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RESEARCH ARTICLES
Dynamic performance of a long-stroke fast tool servo system
Selective electrochemical etching of cantilever-type SOI-MEMS devices
Extraction algorithm for longitudinal and transverse mechanical information of AFM
A button switch inspired duplex hydrogel sensor based on both triboelectric and piezoresistive effects for detecting dynamic and static pressure
Manipulations of micro/nanoparticles using gigahertz acoustic streaming tweezers
REVIEW ARTICLE
A review of anomalous refractive and reflective metasurfaces